0000001 - Document - Cover link:presentationLink link:calculationLink link:definitionLink 9952151 - Statement - CONDENSED CONSOLIDATED BALANCE SHEETS link:presentationLink link:calculationLink link:definitionLink 9952152 - Statement - CONDENSED CONSOLIDATED BALANCE SHEETS (Parenthetical) link:presentationLink link:calculationLink link:definitionLink 9952153 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS link:presentationLink link:calculationLink link:definitionLink 9952154 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF COMPREHENSIVE LOSS link:presentationLink link:calculationLink link:definitionLink 9952155 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF STOCKHOLDERS' EQUITY link:presentationLink link:calculationLink link:definitionLink 9952156 - Statement - CONDENSED CONSOLIDATED STATEMENTS OF CASH FLOWS link:presentationLink link:calculationLink link:definitionLink 9952157 - Disclosure - Description of Business link:presentationLink link:calculationLink link:definitionLink 9952158 - Disclosure - Summary of Significant Accounting and Reporting Policies link:presentationLink link:calculationLink link:definitionLink 9952159 - Disclosure - Revenue link:presentationLink link:calculationLink link:definitionLink 9952160 - Disclosure - Acquisitions link:presentationLink link:calculationLink link:definitionLink 9952161 - Disclosure - Restructuring link:presentationLink link:calculationLink link:definitionLink 9952162 - Disclosure - Intangible Assets link:presentationLink link:calculationLink link:definitionLink 9952163 - Disclosure - Related Parties link:presentationLink link:calculationLink link:definitionLink 9952164 - Disclosure - Debt and Financing Obligations link:presentationLink link:calculationLink link:definitionLink 9952165 - Disclosure - Significant Balance Sheet Components link:presentationLink link:calculationLink link:definitionLink 9952166 - Disclosure - Stock-Based Compensation link:presentationLink link:calculationLink link:definitionLink 9952167 - Disclosure - Income Taxes link:presentationLink link:calculationLink link:definitionLink 9952168 - Disclosure - Segment Reporting link:presentationLink link:calculationLink link:definitionLink 9952169 - Disclosure - Commitments and Contingencies link:presentationLink link:calculationLink link:definitionLink 9952170 - Disclosure - Fair Value of Financial Instruments link:presentationLink link:calculationLink link:definitionLink 9952171 - Disclosure - Sale of Common Stock link:presentationLink link:calculationLink link:definitionLink 9952172 - Disclosure - Subsequent Events link:presentationLink link:calculationLink link:definitionLink 9955511 - Disclosure - Summary of Significant Accounting and Reporting Policies (Policies) link:presentationLink link:calculationLink link:definitionLink 9955512 - Disclosure - Summary of Significant Accounting and Reporting Policies (Tables) link:presentationLink link:calculationLink link:definitionLink 9955513 - Disclosure - Acquisitions (Tables) link:presentationLink link:calculationLink link:definitionLink 9955514 - Disclosure - Restructuring (Tables) link:presentationLink link:calculationLink link:definitionLink 9955515 - Disclosure - Intangible Assets (Tables) link:presentationLink link:calculationLink link:definitionLink 9955516 - Disclosure - Debt and Financing Obligations (Tables) link:presentationLink link:calculationLink link:definitionLink 9955517 - Disclosure - Significant Balance Sheet Components (Tables) link:presentationLink link:calculationLink link:definitionLink 9955518 - Disclosure - Stock-Based Compensation (Tables) link:presentationLink link:calculationLink link:definitionLink 9955519 - Disclosure - Segment Reporting (Tables) link:presentationLink link:calculationLink link:definitionLink 9955520 - Disclosure - Fair Value of Financial Instruments (Tables) link:presentationLink link:calculationLink link:definitionLink 9955521 - Disclosure - Summary of Significant Accounting and Reporting Policies - Schedules of Concentration of Risk, by Risk Factor (Details) link:presentationLink link:calculationLink link:definitionLink 9955522 - Disclosure - Summary of Significant Accounting and Reporting Policies - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955523 - Disclosure - Summary of Significant Accounting and Reporting Policies - Schedule of Antidilutive Securities Excluded from Computation of Diluted Net Loss Per Share (Details) link:presentationLink link:calculationLink link:definitionLink 9955524 - Disclosure - Revenue (Details) link:presentationLink link:calculationLink link:definitionLink 9955524 - Disclosure - Revenue (Details) link:presentationLink link:calculationLink link:definitionLink 9955525 - Disclosure - Acquisitions - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955526 - Disclosure - Acquisitions - Assets Acquired And Liabilities Assumed - Optical Proximity Correction Suite of Tools (Details) link:presentationLink link:calculationLink link:definitionLink 9955527 - Disclosure - Acquisitions - Assets Acquired And Liabilities Assumed - Tech-X Corporation (Details) link:presentationLink link:calculationLink link:definitionLink 9955528 - Disclosure - Restructuring - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955529 - Disclosure - Restructuring - Schedule of Restructuring Reserve (Details) link:presentationLink link:calculationLink link:definitionLink 9955530 - Disclosure - Restructuring - Schedule of Restructuring Expenses (Details) link:presentationLink link:calculationLink link:definitionLink 9955530 - Disclosure - Restructuring - Schedule of Restructuring Expenses (Details) link:presentationLink link:calculationLink link:definitionLink 9955531 - Disclosure - Intangible Assets - Schedule of Finite-Lived Intangible Assets (Details) link:presentationLink link:calculationLink link:definitionLink 9955532 - Disclosure - Intangible Assets - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955533 - Disclosure - Intangible Assets - Schedule of Amortization of Intangible Assets (Details) link:presentationLink link:calculationLink link:definitionLink 9955533 - Disclosure - Intangible Assets - Schedule of Amortization of Intangible Assets (Details) link:presentationLink link:calculationLink link:definitionLink 9955534 - Disclosure - Intangible Assets - Schedule of Finite-Lived Intangible Assets, Future Amortization Expense (Details) link:presentationLink link:calculationLink link:definitionLink 9955535 - Disclosure - Related Parties (Details) link:presentationLink link:calculationLink link:definitionLink 9955536 - Disclosure - Debt and Financing Obligations - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955537 - Disclosure - Debt and Financing Obligations - Schedule of Contractual Obligation, Fiscal Year Maturity (Details) link:presentationLink link:calculationLink link:definitionLink 9955538 - Disclosure - Significant Balance Sheet Components - Prepaid Expense And Other Current Assets And Other Assets (Details) link:presentationLink link:calculationLink link:definitionLink 9955539 - Disclosure - Significant Balance Sheet Components - Schedule of Accrued Expenses and Other Current Liabilities (Details) link:presentationLink link:calculationLink link:definitionLink 9955540 - Disclosure - Stock-Based Compensation - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955541 - Disclosure - Stock-Based Compensation - Schedule of Share-Based Payment Arrangement, Expensed and Capitalized, Amount (Details) link:presentationLink link:calculationLink link:definitionLink 9955541 - Disclosure - Stock-Based Compensation - Schedule of Share-Based Payment Arrangement, Expensed and Capitalized, Amount (Details) link:presentationLink link:calculationLink link:definitionLink 9955542 - Disclosure - Income Taxes (Details) link:presentationLink link:calculationLink link:definitionLink 9955543 - Disclosure - Segment Reporting - Narrative (Details) link:presentationLink link:calculationLink link:definitionLink 9955544 - Disclosure - Segment Reporting - Schedule of Reconciliation of Operating Profit (Loss) from Segments to Consolidated (Details) link:presentationLink link:calculationLink link:definitionLink 9955545 - Disclosure - Commitments and Contingencies (Details) link:presentationLink link:calculationLink link:definitionLink 9955546 - Disclosure - Fair Value of Financial Instruments - Schedule of Fair Value, Liabilities Measured on Recurring Basis (Details) link:presentationLink link:calculationLink link:definitionLink 9955547 - Disclosure - Fair Value of Financial Instruments - Schedule of Fair Value, Liabilities Measured on Recurring Basis, Unobservable Input Reconciliation (Details) link:presentationLink link:calculationLink link:definitionLink 9955548 - Disclosure - Sale of Common Stock (Details) link:presentationLink link:calculationLink link:definitionLink 9955549 - Disclosure - Subsequent Events (Details) link:presentationLink link:calculationLink link:definitionLink